Нанороботичні маніпулятори в скануючій мікроскопії
Бородін А.В., Карнаушенко В.П.
Автоматизація, електроніка та робототехніка. Стратегії розвитку та інноваційні технології, AERT-2020. с. 12-15.
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Abstract
A scanning microscopy provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems with nanoscaled samples. Emerging techniques enable the characterization of nanostructures and the assembly of nanodevices. This presents recent advances in nanorobotic manipulation, tools, sensing units, control and automation techniques, enabled applications. The limitations of the existing technologies and prospects for new technologies are discussed.
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